- International training institute for materials science Batch itims-2006 Title of MSc thesis: A study on design and fabrication of a three degree of freedom piezo-resistive accelerometer based on bulk micromachining using dry etching technique Author: Nguyen Van Minh Supervisors: Asso. - Abstract: Based on piezoresistive effect of silicon material, piezoresistive acceleration sensor has been designed and fabricated by bulk micromachining using dry etching technique. - In the scope of this thesis, the technology process has been established for fabricating acceleration sensor, which suites with conditions and equipments at ITIMS. - The acceleration sensor with miniatured dimension has been simulated by ANSYS software and it has been fabricated by bulk micromachining technology using dry etching technique. - The fabricated acceleration microsensors are packaged and characterised based on the measurement system which is connected with computer. - The investigated results show that OX sensitivity is 30.5 μV/g and OZ sensitivity is 22.9 μV/g . - The obtained results show the ability of fabricating piezoresistive acceleration microsensor in VietNam.
Xem thử không khả dụng, vui lòng xem tại trang nguồn hoặc xem
Tóm tắt